EE/MatE 167: Microelectronic Manufacturing Methods

David W. Parent

Assistant Professor

Office Hours: MW 10:30-11:30

EE Department SJSU

PH: 408.924.3963

Course Description:

CMOS manufacturing methods; advanced processing for integrated circuits. Analysis of yield, statistical process control and design of experiments as applied to process design, integration and characterization.

This is a team-oriented, interdisciplinary course enrolling EE, MatE, ChE, ME, Chemistry and Physics majors. Each student brings a different background to the course. The laboratory is the central theme of the course. This course will require a considerable amount of work outside of regularly scheduled class time so be prepared to invest a lot of time.

Green Sheet/ Syllabus

Pixel Level Intensity to Digital Converter

AMI06 transistor data

AMI06 ALC

2 Mask Sentaurus Work Bench File

Table 1: Lecture Topics

#	Date	Topic	Read	Items Due
1	1/24/2007	Device Physics Review	Notes
2	1/29/2007	ALC Design Flow	Notes	HW 1 Solution	Review, Diagnostic
3	1/31/2007	Design of CMOS Analog Circuits 1	Notes
4	2/5/2007	Design of CMOS Analog Circuits 2	Notes	HW 2 HW2 Solution	Design Current Mirror
5	2/7/2007	SPC 1	6.1/6.2 Notes
6	2/12/2007	Tape Out Projects	NA	HW 3	6.1 , 6.6
7	2/14/2007	SPC 2	6.3 Notes Excel File with data for example
8	2/19/2007	SPC 3	6.4 Notes
9	2/21/2007	Review of Semiconductor Manufacturing	1 Notes	HW 4 Solution Excel File for HW 4	Sample Control Charts
10	2/26/2007	Oxidation	2.1 Notes	HW 5	# 1.1, 1.2, 1.3
11	2/28/2007	Photolithography	2.2 Notes
12	3/5/2007	Etching	2.3 Notes	HW 6	#2.1, 2.2 2.3
13	3/7/2007	Doping	2.4 Notes
14	3/12/2007	Transistor Process Design	Notes	HW 7	#2.4, 2.6, 2.7
15	3/14/2007	Project Design Reviews
16	3/19/2007	Yield 1	5.1/5.2
17	3/21/2007	Yield 2	5.3/5.4
18	3/26/2007	Spring Break
19	3/28/2007	Spring Break
20	4/2/2007	MOS Verification	Notes	HW 8	#5.1, 5.2, 5.3
21	4/4/2007	Continue two mask fabrication project
22	4/9/2007	Reliability 1	Notes
23	4/11/2007	Continue two mask fabrication project
24	4/16/2007	Reliability 2	Notes
25	4/18/2007	Continue Testing	Testing Manual
26	4/23/2007	Statistical Experimental Design 1	7.1
27	4/25/2007	Continue Testing	Testing Manual
28	4/30/2007	Statistical Experimental Design 2	7.2
29	5/2/2007	Statistical Experimental Design 3	7.3	HW 9	#7.1, 7,2
30	5/7/2007	CMOS Review	Notes
31	5/9/2007	Continue Testing	Testing Manual
32	5/14/2007	SPC Review	Notes
33	5/22/2007	Final Exam 14:45-1700

Table 2 Lab Activities

#	Date	Topic	Item Due
1	1/24/2007	ALC/Unix Tutorial
2	1/31/2007	Pick Projects, specification, start project
3	2/7/2007	Design Review	Verification Document
4	2/14/2007	Lab tour, Safety, Learn how to Read Veniers
5	2/21/2007	SPC overlay project (Take Data)
6	2/28/2007	Introduction to Sentaurus Workbench (Tutorial.)	SPC Venier Report
7	3/7/2007	Start Design of 2-mask process
8	3/14/2007	Finish Design of 2-mask process	Oral Report/Traveler
9	3/21/2007	Begin two mask fabrication project
10	3/28/2007	Spring Break
11	4/4/2007	Continue two mask fabrication project
12	4/11/2007	Continue two mask fabrication project
13	4/18/2007	Testing two mask project	&n