Week 1: Employee Orientation
 | In-Class 1: Intro to Materials |
Week 2 : Overview Material
| Lecture Notes: Overview of Materials & Processing |
Week 2 & 3: Review of Device Physics
|
Lecture Notes: Diode Physics
| ||
| Lecture Notes: MOS Capacitors | ||
| Resource on CMOS Process Flow | ||
| Resource on Different IC Components |
Week 3: Semiconductor Materials
| Lecture Notes: Semiconductor Materials & Wafer Manufacturing |
| Resource on Semiconductor Materials |
Week 4: Defects & Cleaning
| Lecture Notes on Defects and Cleaning |
| Resource on Cleaning |
Week 5: Oxidation
| Lecture Notes on Oxidation |
| In-Class: Different Oxide Layers in Microelectronics |
| In-Class: Factors Affecting the Oxidation Rate |
| Resource on Oxidation |
Week 6: Lithography
| Lecture Notes on Lithography |
| In-Class: Positive vs Negative Photoresist |
Week 7: Diffusion
| Lecture Notes on Diffusion (Revised slightly: includes C(x,t) with Co and what an erf is) |
| In-Class Activity: B diffusion profile |
| Resource on Diffusion |
Week 8 & 9: Ion Implantation
| Lecture Notes on Ion Implantation |
| In Class Activity: Lorenz Force |
| Resource on Ion Implantation |
Week 10: Vacuum and Plasma
| Lecture notes on vacuum and plasma |
| Resource on vacuum and plasma |
| AC Plasma in class activity |
Week 11: Etching
| Outline of etching |
| Lecture Notes on etching (some extra on plasma as well) |
Week 12-13: Deposition
|
Evaporation Notes
| ||
|
Sputtering Notes
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| CVD Notes
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| Extra on PVD |
