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ME 157 Mechanical System Design
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SAN JOSÉ STATE UNIVERSITY Mechanical and Aerospace Engineering DepartmentME 250 - Precision Machine Design
Fall 2001 Instructor: Dr.
Raymond K. Yee Office:
E-310A Phone:
(408) 924-3935 E-mail: rkyee@email.sjsu.edu Office hrs: Tuesday 1:30-4:00 pm, Thursday, 1-2:30 pm, 4:20-5:20 pm Class
room: Industrial
Studies (IS) room 120 Class
time: Tuesday
and Thursday, 5:30 - 6:45 pm Class
codes: 17003 Final
Exam: Tuesday,
December 18, 2001, 17:15 - 19:30 pm COURSE
OBJECTIVE: ·
To provide
the student with an overview of the principles of precision machine design, and
develop within him or her, the necessary understanding and discipline to
successfully design and develop precision machines and mechanisms. Lectures
will be augmented by experts from local industry, hands-on demonstrations, and
tours. Students will work in teams of two members on a research project to
acquire an in-depth knowledge on a chosen topic in the course. Prerequisites:
ME 157 or equivalent Required
Text:
Slocum, A. H., “Precision Machine Design,” Society of Manufacturing
Engineers, Dearborn, MI, 1992. Recommended
Text: Smith,
S. T., Chetwynd, D. G., Foundations of Ultraprecision Mechanism Design,
Gordon and Breach Science Publishers, Switzerland, 1992. Grading:
Homework 15%, Presentations 15%, Research Project 25%, Midterm Exam 20%,
Final Exam 25% COURSE
SCHEDULE (tentative) Week/Date
Event Reading 1
8/28
Enrollment, introduction to the course and subject
8/30
Accuracy, repeatability, precision, resolution, cosine error, Abbe
error Sloc:
1.4, 2.1-2.1.2 2
9/4
Kinematic constraint, semi-kinematic constraint,
Sloc: 7.4.3, 7.4.6, 7.7, 7.8
9/6
kinematic coupling
Blanding: p. 1-33 3
9/11
No class (Instructor is out of town attending conference)
9/13
Flexures
Sloc: 8.6 4
9/18
Structural loop, measurement loop, metrology frames
Sloc: 7.4.2
9/20
Metrology frames, compensation
Sloc: 5.7 5
9/25
Guest speaker: Andy Hazelton, Nikon Research, “Design of Wafer
Steppers”
9/27
Homogenous transformation matrix, error budgets
Sloc: 2.2 6
10/2
Quasi-static mechanical errors
Sloc: 2.3
10/4
Tour & presentation: Dave
Markle, Ultratech Stepper, Inc. 7
10/9
Material and Structural considerations for precision design
Sloc: 7.1-7.5
10/11
Midterm exam
8
10/16
Guest speaker: Phil
Batson, “Topic to be provided later”
10/18
Encoders and scale based metrology
Sloc: 4.3 9
10/23
Guest speaker: Layton Hale “Flexure and Kinematic Mount
Design”
10/25
LVDT’s, capacitive, and inductive displacement sensors
Sloc:3.1 –3.2.7, 4.2 10 10/30
Research project progress presentations
11/1
Guest speaker: Bill Tandler, “GT&D Applied to Coordinate
Metrology”
Sloc: 1.6
11
11/6
Interferometry
Sloc: 4.5
11/8
Tour: (tentative) Precision Engineering at Stanford University
12
11/13
Bearings and precise linear motion
Sloc: 8.1-8.2, 8.5
11/15
Tour (tentative): Ron
Witherspoon, Inc., Precision Machining
13
11/20
Bearings and precise rotary motion
Sloc: 8.3-8.4, p.323
11/22
No Class (Thanksgiving Holiday)
14
11/27
Guest speaker (tentative): Eric Dyssegard, “Lapping”
11/29
Actuators for precision motion: voice-coil actuators
Sloc: 10.4 15
12/4
Tour: (tentative) KLA-Tencor or Redwood Microsystem
12/6
Actuators for precision motion: piezoelectric actuators
Sloc: 10.5 16
12/11
Research project final presentations
12/13
Research project final report Due Date Additional
Notes: Homework
will be due at the beginning of class on the assigned date. If homework is not
turned in at this time, only partial credit will be given, unless prior
arrangements have been made. Reading
assignment should be completed prior to class as preparation for the lecture. References: (Some of the references listed below are on reserve for your reading pleasure in the Reserve Bookroom (RBR) in Clark Library) 1.
Moore, W. R., Foundations of Mechanical Accuracy, The Moore
Special Tool Company, Bridgeport, Connecticut, 1970. (RBR) 2.
Whitehead, T. N., The Design and Use of Instruments and Accurate
Mechanism, Dover, New York, 1954. (RBR) 3.
Franse, J., “Manufacturing Techniques for Complex Shapes With Submicron
Accuracy,” Rep. Prog. Phys., vol. 53, 1990, pp. 1049-1094. 4.
Blanding, D. L., Principles of Exact Constraint Mechanical Design,
Kodak Research Laboratories, Rochester, New York, 1992. (RBR) 5.
Jones, R. V., Instruments and Experiences, Papers on Measurement and
Instrument Design, John Wiley & Sons, Chichester, 1988. (RBR, selected
readings only) 6.
Rolt, F. H., Gauges and Fine Measurements, vols. 1 and 2,
Macmillan and Co. Ltd., London, 1929. (RBR)
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