Computer Modeling on the Effect of an Electric Field on the Growth of Thin Films

SJSU PI:
PI and Co-PI Names:
Julio Garcia, (PI)
Description:

This research seeked to predict the growth of thin films under an applied electric field using a computer model written in LabVIEW in a Windows environment. The experimental portion was carried out at the Microfabrication Laboratory at the University of California at Berkeley, California on an Edwards Auto 306 DC sputtering system, using argon atmosphere with voltage applied to the substrate. The thin film growth rate and sheet resistance were measured. The influences of applied substrate voltage on growth rate and sheet resistance were examined using the computer model.

Funding Organization:
NSA (National Security Agency)
Amount Funded:
$95,781
Project Duration:
6/21/2004 to 6/21/2005