Equipment

This page lists most of the standard equipment in the laboratory.  Please follow available links for more detail with respect to advice, policy, instructions, training, for each equipment station.  A layout map of the main laboratory in Room E311 of the Engineering Building shows functional locations.

Photolithography

• Quintel Q4000 Aligner

• Quintel Q7000 Aligner

• MTI Multifab Coater

• MTI Multifab Developer

• Laurell Spin Processor

Plasma Etching

• Applied Materials 8110

• March CS-1701 Plasma Etcher

Wet Processing

• Wet Benches

• Spin Rinse Dryers

Metal Deposition

• Filament Evaporator

• Denton Explorer 14 sputter system

Thermal Processing

• Oxidation & Diffusion Furnace

• Anneal Furnace

Metrology & Testing

• Probe Stations w/ HP4145

• C-V Test Station

• Filmetrics F20-UV

• NanoSpec 210 (Film Thickness)

• NanoSpec AFT-10 (Film Thickness)

• Veeco Wyko NT 9100 Optical Profiler

• Signatone Four-Point Probe

• G&R Labs UV Intensity Meter

Some links lead to PDF files which require Adobe Acrobat Reader.

SJSU  Microscale Process Engineering Laboratory  http://www.engr.sjsu.edu/mpel/

Last Modified 9/19/2008 by SJL