MatE/EE 129 Basic IC Fabrication and Design

Theoretical and practical aspects of processing materials for electronic, optical and magnetic devices. Structure and defects in electronic materials; deposition and etching processes; photolithography; characterization of electronic materials devices and processes. 3 Units lecture/lab. Prerequisite: MatE 25 or MatE 153.

MatE/ChE 166 Advanced Thin Film Processes

Science and engineering of thin film deposition, etching, and patterning processes used in microelectronic fabrication. 3 units lecture/lab. Prerequisite: MatE/EE 129.

MatE/EE 167 Microelectronics Manufacturing Methods

CMOS manufacturing methods. Advanced processing for integrated circuits. Analysis of yield, statistical process control and design of experiments as applied to process design, integration and characterization. 3 units lecture/lab. Prerequisites: MatE/EE 129, ISE 135 or consent of instructor.

ME/EE/MatE 169 MEMS Fabrication and Design

Hands-on design, fabrication, and testing of micro electro-mechanical systems (MEMS). Processes including oxidation, photolithography, etching, wet processing, and metal deposition applied to MEMS. Design problems for MEMS transducer components such as cantilever beam actuators, membrane deflection sensors, and microfluidic flow channels. 3 units lecture/lab. Prerequisite: CE 112 or MatE 25 or EE 98.

MatE 153 Electronic, Optical and Magnetic Properties of Materials

Electronic properties of solids with special focus on semiconductor materials. 3 units lecture/lab. Prerequisite: Chem 11A, Math 133, Phys 71, EE 98.

SJSU  Microscale Process Engineering Laboratory  http://www.engr.sjsu.edu/mpel/

Last Modified 2/7/2007 by SJL